JPH048030U - - Google Patents
Info
- Publication number
- JPH048030U JPH048030U JP4783790U JP4783790U JPH048030U JP H048030 U JPH048030 U JP H048030U JP 4783790 U JP4783790 U JP 4783790U JP 4783790 U JP4783790 U JP 4783790U JP H048030 U JPH048030 U JP H048030U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- performance filter
- room
- clean
- thin tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4783790U JPH048030U (en]) | 1990-05-08 | 1990-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4783790U JPH048030U (en]) | 1990-05-08 | 1990-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH048030U true JPH048030U (en]) | 1992-01-24 |
Family
ID=31564122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4783790U Pending JPH048030U (en]) | 1990-05-08 | 1990-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH048030U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007160249A (ja) * | 2005-12-15 | 2007-06-28 | Matsushita Electric Ind Co Ltd | ファンフィルターユニット |
| JP2010240586A (ja) * | 2009-04-07 | 2010-10-28 | Panasonic Corp | フィルタ装置およびそれを搭載したファンフィルタユニット |
-
1990
- 1990-05-08 JP JP4783790U patent/JPH048030U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007160249A (ja) * | 2005-12-15 | 2007-06-28 | Matsushita Electric Ind Co Ltd | ファンフィルターユニット |
| JP2010240586A (ja) * | 2009-04-07 | 2010-10-28 | Panasonic Corp | フィルタ装置およびそれを搭載したファンフィルタユニット |